Plasma processing of materials :scientific opportunities and technological challenges

• 作者: National Research Council (U.S.).
• 出版: Washington, D.C. : National Academy Press 1991.
• 稽核項: 1 online resource (xii, 75 pages) :illustrations.
• 標題: Technique des plasmas. , TECHNOLOGY & ENGINEERING Mechanical. , TECHNOLOGY & ENGINEERING , Microélectronique , MatériauxEffets du rayonnement sur. , Microelectronics , MaterialsEffect of radiation on. , Mechanical. , Electronic books. , Microélectronique Matériaux -- Effets du rayonnement sur. , Surfaces (Technologie) , Plasma engineering. , Microelectronics Materials -- Effect of radiation on. , Surfaces (Technology) , Electronic book.
• ISBN: 0585084637 , 9780585084633
• ISBN: 0309045975 , 9780309045971
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