Beam technologies for integrated processing :report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

• 作者: National Research Council (U.S.).
• 出版: Washington, D.C. : National Academy Press 1992.
• 稽核項: 1 online resource (xii, 89 pages) :illustrations.
• 標題: Molecular Industrial applications , Dépôt chimique en phase vapeur activé par plasma Applications industrielles. , TECHNOLOGY & ENGINEERING , Molecular beams , ElectronicsDigital. , Molecular beams Industrial applications. , Applications industrielles. , Faisceaux moléculaires , Materials. , Microelectronics industry. , ElectronicsMicroelectronics. , Electronic book. , Industrial applications. , Plasma-enhanced Industrial applications , Microélectronique , Microélectronique Matériaux. , Matériaux. , Microelectronics , Plasma-enhanced chemical vapor deposition Industrial applications. , Electronic books. , Microelectronics Materials. , Industrie. , Plasma-enhanced chemical vapor deposition , Microélectronique Industrie. , Dépôt chimique en phase vapeur activé par plasma , TECHNOLOGY & ENGINEERING Electronics -- Microelectronics. , Microelectronics industry , TECHNOLOGY & ENGINEERING Electronics -- Digital. , Faisceaux moléculaires Applications industrielles. , Microelectronics Materials
• ISBN: 0585149453 , 9780585149455
• ISBN: 0309046351 , 9780309046350
• 試查全文@TNUA:
  
• 附註: "NMAB-461." Includes bibliographical references.
• 電子資源: https://dbs.tnua.edu.tw/login?url=https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14749
• 系統號: 005288820
• 資料類型: 電子書
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• 引用網址: 複製連結
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