Microelectromechanical systems :advanced materials and fabrication methods

• 其他作者: National Research Council (U.S.). , National Research Council (U.S.). , National Research Council (U.S.).
• 出版: Washington, DC : National Academy Press 1997.
• 稽核項: 1 online resource (xiv, 61 pages) :illustrations.
• 標題: Microsystèmes électromécaniques Conception et construction. , Microelectromechanical systems , Microélectronique Matériaux. , TECHNOLOGY & ENGINEERING , Microélectronique , Matériaux. , Microelectronics Materials. , Materials. , ElectronicsDigital. , Microelectronics , Conception et construction. , ElectronicsMicroelectronics. , TECHNOLOGY & ENGINEERING Electronics -- Digital. , Microelectromechanical systems Design and construction. , Microsystèmes électromécaniques , Electronic books. , Electronics / Microelectronics. , TECHNOLOGY & ENGINEERING. , TECHNOLOGY & ENGINEERING Electronics -- Microelectronics. , Design and construction. , Andre fag (naturvidenskab og teknik) Andre fag
• ISBN: 6610187096 , 9786610187096
• ISBN: 0309058856 , 9780309058858 , 0309058956
• 試查全文@TNUA:
  
• 附註: Includes bibliographical references (pages 51-55).
• 電子資源: https://dbs.tnua.edu.tw/login?url=https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1507
• 系統號: 005303544
• 資料類型: 電子書
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• 引用網址: 複製連結
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