Industrial plasma engineering.Vol. 2,Applications to nonthermal plasma processing
- 作者: Roth, J. Reece.
- 出版: Bristol : Institute of Physics Pub. ©2001.
- 稽核項: 1 online resource (xi, 645 pages) :illustrations, 1 map.
- 標題: TECHNOLOGY & ENGINEERING , TECHNOLOGY & ENGINEERING Mechanical. , Mechanical. , Electronic books. , Plasma engineering. , Manufacturing processes.
- ISBN: 142003412X , 9781420034127
- ISBN: 0750305444 , 0750305452 , 9780750305440
- 試查全文@TNUA:
- 附註: Includes bibliographical references and index. Chapter 14 Surface Interactions in Plasma Processing -- chapter 15 Atmospheric Pressure Plasma Sources -- chapter 16 Vacuum Plasma Sources -- chapter 17 Plasma Reactors for Plasma Processing -- chapter 18 Specialized Techniques and Devices for Plasma Processing -- chapter 19 Parametric Plasma Effects On Plasma Processing -- chapter 20 Diagnostics for Plasma Processing -- chapter 21 Plasma Treatment of Surfaces -- chapter 22 Surface Modification by Implantation and Diffusion -- chapter 23 Thin-Film Deposition by Evaporative Condensation and Sputtering -- chapter 24 Plasma Chemical Vapor Deposition (PCVD) -- chapter 25 Plasma Etching.
- 電子資源: https://dbs.tnua.edu.tw/login?url=https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=101875
- 系統號: 005305775
- 資料類型: 電子書
- 讀者標籤: 需登入
- 引用網址: 複製連結
Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices tha
來源: Google Book
來源: Google Book
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