附註:Includes bibliographical references and index.
An Introduction to Microelectromechanical Systems Engineering -- An Introduction to Microelectromechanical Systems Engineering -- Table of Contents -- Foreword xiii -- Preface xv -- Preface to First Edition xix -- CHAPTER 1 MEMS: A Technology from Lilliput 1 -- The Promise of Technology 1 -- What Are MEMS or MST? 2 -- What Is Micromachining? 3 -- Applications and Markets 4 -- To MEMS or Not To MEMS? 7 -- Standards 8 -- The Psychological Barrier 8 -- Journals, Conferences, and Web Sites 9 -- Summary 11 -- CHAPTER 2 Materials for MEMS 13 -- Silicon-Compatible Material System 13.
Other Materials and Substrates 21 -- Important Material Properties and Physical Effects 24 -- Summary 31 -- CHAPTER 3 Processes for Micromachining 33 -- Basic Process Tools 34 -- Advanced Process Tools 55 -- Nonlithographic Microfabrication Technologies 63 -- Combining the Tools Examples of Commercial Processes 68 -- Summary 74 -- CHAPTER 4 MEM Structures and Systems in Industrial and Automotive Applications 79 -- General Design Methodology 79 -- Techniques for Sensing and Actuation 81 -- Passive Micromachined Mechanical Structures 85 -- Sensors and Analysis Systems 89.
Actuators and Actuated Microsystems 116 -- Summary 128 -- CHAPTER 5 MEM Structures and Systems in Photonic Applications 133 -- Imaging and Displays 133 -- Fiber-Optic Communication Devices 141 -- Summary 165 -- CHAPTER 6 MEMS Applications in Life Sciences 169 -- Microfluidics for Biological Applications 169 -- DNA Analysis 172 -- Microelectrode Arrays 182 -- Summary 185 -- CHAPTER 7 MEM Structures and Systems in RF Applications 189 -- Signal Integrity in RF MEMS 189 -- Passive Electrical Components: Capacitors and Inductors 190 -- Microelectromechanical Resonators 200.
Microelectromechanical Switches 211 -- Summary 214 -- CHAPTER 8 Packaging and Reliability Considerations for MEMS 217 -- Key Design and Packaging Considerations 218 -- Die-Attach Processes 225 -- Wiring and Interconnects 227 -- Types of Packaging Solutions 233 -- Quality Control, Reliability, and Failure Analysis 243 -- Summary 256 -- Glossary 261 -- About the Authors 271 -- Index.
摘要:Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list.
