附註:Committee chair: Francis F. Chen.
This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
Plasma Processing and Processing Science -- Copyright -- Preface -- Contents -- Chapter 1 Introduction and Summary -- Chapter 2 Modeling and Simulation of Plasma Processing -- RESEARCH OPPORTUNITIES -- Requirements of the Microelectronics Fabrication Industry -- Multidimensional Models -- Plasma Chemistry -- Surface Chemistry -- Electromagnetics -- Current Status of Modeling and Simulation -- Particle-in-Cell Simulations -- Kinetic Models -- Fluid or Hydrodynamic Models -- Hybrid Models -- A ROLE FOR NRL -- Chapter 3 Semiconductor Processing
RESEARCH OPPORTUNITIESA ROLE FOR NRL -- Development and Characterization of Precompetitive Materials and Processes -- Comparative Analysis and Characterization of Tools and Processes in Development -- Sensor Development for Control and Fingerprinting of Manufacturing Processes -- Chapter 4 Plasma Deposition and Polymerization -- RESEARCH OPPORTUNITIES -- Semiconductor Fabrication -- Barrier Coatings -- Fibrous Materials -- Optical Coatings and Photonics -- Plasma Polymerization -- A ROLE FOR NRL -- Chapter 5 Ion Implantation and Surface Modification
RESEARCH OPPORTUNITIESIntroduction -- Plasma and Ion Beam Implantation Technology -- Ion Beam Implantation -- Plasma Source Ion Implantation -- Applications -- Implantation of Metals -- Implantation of Nonmetals -- A ROLE FOR NRL -- Chapter 6 Thermal Plasmas -- RESEARCH OPPORTUNITIES -- Introduction -- Plasma Spraying -- Plasma Chemical Vapor Deposition -- Plasma Waste Destruction -- Plasma Metallurgy -- Thermal Plasma Synthesis -- Plasma Consolidation -- A ROLE FOR NRL -- Thermal Plasma Waste Destruction -- Plasma Chemical Vapor Deposition
Diamond FilmsCubic Boron Nitride Films -- Carbon Nitride -- Chapter 7 Flat Panel Displays -- RESEARCH OPPORTUNITIES -- Introduction -- Passive Matrix Liquid Crystal Display -- Active Matrix Liquid Crystal Display -- Amorphous Silicon -- Polycrystalline Silicon -- Transfer Silicon -- Thin Film Electroluminescent Displays -- Digital Micromirror Devices -- Plasma Displays -- Field Emission Displays -- A ROLE FOR NRL -- Chapter 8 Low-Temperature Plasma Physics -- RESEARCH OPPORTUNITIES -- A ROLE FOR NRL -- Chapter 9 Conclusions and Recommendations
