Particles on surfaces 8 :detection, adhesion and removal

• 其他作者: Mittal, K. L.,
• 出版: Utrecht ;Boston : VSP 2003.
• 稽核項: 1 online resource (viii, 352 pages) :illustrations.
• 標題: TECHNOLOGY & ENGINEERING , TECHNOLOGY & ENGINEERING Nanotechnology & MEMS. , Particles Congresses. , Conference papers and proceedings. , Surfaces (Technology) Congresses. , Particles. , Particles , Particules (Matière) , Electronic book. , Electronic books. , Particules (Matière) Congrès. , Surfaces (Technologie) , Nanotechnology & MEMS. , Surfaces (Technology) , Surfaces (Technologie) Congrès.
• ISBN: 9047403339 , 9789047403333
• ISBN: 9067643920 , 9789067643924
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• 附註: "This volume documents the proceedings of the 8th International Symposium on Particles on Surfaces: Detection, Adhesion, and Removal held under the auspices of MST Conferences in Providence, Rhode Island, June 24-26, 2002 Includes bibliographical references. Preface; The nature and characterization of small particles; Surface and micro-analytical methods for particle identification; The haze of a wafer: A new approach to monitor nano-sized particles; Particle transport and adhesion in an ultra-clean ion-beam sputter deposition process; Particle deposition from a carry-over layer during immersion rinsing; The use of surfactants to reduce particulate contamination on surfaces; The use of rectangular jets for surface decontamination; Ice-air blast cleaning: Case studies.
• 摘要: This work documents the proceedings of the 8th International Symposium on Particles on Surfaces - Detection, Adhesion and Removal, held in Providence, Rhode Island, from June 24-26, 2002. Topics include nature and characterization of small particles, and particle deposition during immersion rinsing.
• 電子資源: https://dbs.tnua.edu.tw/login?url=https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=117243
• 系統號: 005321659
• 資料類型: 電子書
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• 引用網址: 複製連結
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