Wafer manufacturing[electronic resource] :shaping of single crystal silicon wafers

  • 作者: Kao, Imin I.
  • 其他作者: Chung, Chunhui.
  • 出版: Hoboken, NJ : Wiley 2021.
  • 稽核項: 1 online resource.
  • 標題: Semiconductor wafers Design and construction. , Semiconductor wafers , Design and construction.
  • ISBN: 1118696255 , 9781118696255
  • ISBN: 9780470061213
  • 試查全文@TNUA:
  • 附註: Includes bibliographical references and index.
  • 摘要: "A wafer (often from silicon crystals) is a thin slice of semiconducting material, upon which microcircuits are constructed by doping, etching, and deposition of various materials. Generally, they are cut from a semiconductor using a diamond saw, then polished on one or both faces. Wafer slicing is the first post crystal-growth step toward producing a polished wafer for electronic device fabrication in the semiconductor and photovoltaic (PV) industry. Advanced slicing technologies such as wiresawing are nowadays widely used in wafer production because of its ability to cut single crystalline and polycrystalline crystals with large diameter and produce wafers from thick (a few mm) to very thin sizes (300 microns)."--
  • 電子資源: https://dbs.tnua.edu.tw/login?url=https://onlinelibrary.wiley.com/doi/book/10.1002/9781118696224
  • 系統號: 005326047
  • 資料類型: 電子書
  • 讀者標籤: 需登入
  • 引用網址: 複製連結